SubsidieMeestersDispersion force masked-based helium atom lithography
The FabouLACE project aims to develop a disruptive lithography technology using metastable atoms to achieve 2 nm chip features, enhancing performance and enabling new markets by 2031.
Projectdetails
As Margrethe Vestager, European Commission Executive Vice-President, said “There is no ‘digital’ without chips”.
Introduction
Leading-edge semiconductors provide the foundation of the digitalization of entire sectors and industries that are transforming the EU economy and of emerging technologies such as artificial intelligence and quantum computing.
Photolithography Challenges
Photolithography is currently used for the initial patterning step of chip manufacturing, and leading-edge chips require smaller and smaller features. The smallest features that can be produced with this technology (26 nm at present and expected to reach 16 nm in 2028) not only limit the performance and power efficiency of leading-edge chips but also the opening of new markets linked to quantum devices and silicon devices with integrated light sources.
FabouLACE Project
FabouLACE project catches this opportunity through a disruptive lithography approach that uses metastable atoms and dispersion force-based masks and enables features of 2 nm.
Current Stage and Development
The technology, currently at proof of concept stage and protected by two patents, will be brought to TRL 6 by the end of the project by developing a prototype. Its performances will be validated together with Imec (a key actor in the development, testing, and early adoption of nano- and digital technology innovations, including lithography) and end-users in the markets of interest.
Market Introduction
The spin-off Lace, founded in 2022, will bring the technology to the market by 2031. The technology has already attracted significant interest among investors, raising 450k€ in a few months, and among the major foundry Intel, which accepted Lace into its highly competitive start-up program, Intel Ignite.
Business Readiness
Market and business readiness will be developed together with end-users, leveraging the economic support from investors, with over 3M€ in private funding expected to be attracted by 2026.
Financial Projections
The technological and business maturation is expected to result in as much as 628M€ in revenue in the 2031-2036 period.
Conclusion
Let the quantum future begin.
Financiële details & Tijdlijn
Financiële details
| Subsidiebedrag | € 2.499.397 |
| Totale projectbegroting | € 2.499.397 |
Tijdlijn
| Startdatum | 1-12-2023 |
| Einddatum | 30-11-2026 |
| Subsidiejaar | 2023 |
Partners & Locaties
Projectpartners
- LACE LITHOGRAPHY ASpenvoerder
- INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Land(en)
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