SubsidieMeestersWide Angle and Resolution Metrology
WOOPTIX aims to enhance its metrology system to a 300mm field of view, utilizing patented wavefront sensor technology for high-resolution measurements, driving significant business growth.
Projectdetails
Introduction
WOOPTIX will upgrade to a 300mm field of view (FoV) metrology system a ready-to-market 50mm field of view Wooptix´s tool, based on a disruptive technology that measures the phase component of a beam of light (wavefront sensor) with a naked sensor, reaching a resolution orders of magnitude higher than other wavefront sensors. This technology has been patented by the company.
Business Opportunity
The scalability of the solution will present an outstanding business opportunity for WOOPTIX, leading the company to achieve an amazing turnover rise.
System Capabilities
Our semiconductor metrology system is capable of measuring the full 300mm silicon wafer geometry with:
- A lateral resolution of 3.2µm
- A height resolution of 0.3nm
This data is acquired in a single image snapshot in 100ms while capturing 15 million data points.
Operating Principle
The system works by using a standard digital image sensor to acquire the intensity of the reflected, non-coherent light from the silicon surface at two separate locations along the optical path.
Financiële details & Tijdlijn
Financiële details
| Subsidiebedrag | € 2.500.000 |
| Totale projectbegroting | € 6.357.210 |
Tijdlijn
| Startdatum | 1-10-2022 |
| Einddatum | 30-9-2024 |
| Subsidiejaar | 2022 |
Partners & Locaties
Projectpartners
- WOOPTIX SLpenvoerder
Land(en)
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